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IMAGE SENSOR
CCD image sensor
S9037/S9038 series
High-speed operation, back-thinned FFT-CCD
S9037/S9038 series FFT-CCD image sensors were developed for high-speed line scan cameras. Since an on-chip amplifier having a wide bandwidth is used to an image sensor, a pixel rate of 10 MHz can be obtained. S9037/S9038 series image sensors also deliver a high line scan rate equivalent to interline CCD sensors when used in line binning operation mode, because they have an active area pixel format where the number of vertical pixels is less than the number of horizontal pixels. This makes S9037/S9038 series ideal for line scan cameras. S9037/S9038 series image sensors have a pixel size of 24 x 24 m and are available in pixel formats of 512 x 4 pixels and 1024 x 4 pixels. S9038 series has a one-stage thermoelectric cooler assembled in the same package allowing stable operation at cooled temperatures. Both S9037/S9038 series image sensors use a quartz glass window equivalent to SUPRASIL glass that provides high transmittance even at 193 nm wavelength. These image sensors also have stable quantum efficiency in the UV region making them ideal for excimer laser monitors.
l High-speed operation: 10 MHz l Pixel size: 24 x 24 m l Line/pixel binning operation l S9038 series: one-stage thermoelectric cooling l High quantum efficiency: 90 % or more at peak l MPP operation
Features
Applications
l Excimer laser monitors l High-speed line scan cameras
s Selection guide
Type No. S9037-0902 S9037-1002 S9038-0902S S9038-1002S Cooling Non-cooled One-stage TE-cooled Number of total pixels 520 x 6 1044 x 8 520 x 6 1044 x 8 Number of active pixels 512 x 4 1024 x 4 512 x 4 1024 x 4 Active area [mm (H) x mm (V)] 12.288 x 0.096 24.576 x 0.096 12.288 x 0.096 24.576 x 0.096
s Specifications
Parameter S9037-0902 S9037-1002 S9038-0902S S9038-1002S Line rate 16 kHz 8 kHz 16 kHz 8 kHz Data rate 10 MHz Vertical clock 2 phases Horizontal clock 2 phases Output circuit Two-stage MOSFET source follower Package 24 pin metal package Window material *1 Quartz window equivalent to SUPRASIL AR-coated sapphire *1: Window-less type is available as option.
1
CCD image sensor
s Absolute maximum ratings (Ta=25 C)
Parameter Operating temperature Storage temperature OD voltage RD voltage ISH voltage IGH voltage SG voltage OG voltage RG voltage TG voltage Vertical clock voltage Horizontal clock voltage Symbol Topr Tstg VOD VRD VISH VIG1H, VIG2H VSG VOG VRG VTG VP1V, VP2V VP1H, VP2H Min. -50 -50 -0.5 -0.5 -0.5 -10 -10 -10 -10 -10 -10 -10
S9037/S9038 series
Typ. Max. +70 +70 +25 +18 +18 +15 +15 +15 +15 +15 +15 +15 Unit C C V V V V V V V V V V
s Operating conditions (MPP mode, Ta=25 C)
Parameter Output transistor drain voltage Reset drain voltage Output gate voltage Substrate voltage Test point (horizontal input source) Test point (horizontal input gate) Vertical shift register clock voltage Horizontal shift register clock voltage Summing gate voltage Reset gate voltage Transfer gate voltage Symbol VOD VRD VOG VSS VISH VIG1H, VIG2H VP1VH, VP2VH VP1VL, VP2VL VP1HH, VP2HH VP1HL, VP2HL VSGH VSGL VRGH VRGL VTGH VTGL Min. 12 11.5 1 -8 4 -9 4 -9 4 -9 4 -9 4 -9 Typ. 15 12 3 0 VRD 0 6 -8 6 -8 6 -8 6 -8 6 -8 Max. 12.5 5 8 -7 8 -7 8 -7 8 -7 8 -7 Unit V V V V V V V V V V V
High Low High Low High Low High Low High Low
s Electrical characteristics (Ta=25 C)
Remark -0902 Vertical shift register capacitance CP1V, CP2V -1002 -0902 Horizontal shift register capacitance CP1H, CP2H -1002 Summing gate capacitance CSG Reset gate capacitance CRG Transfer gate capacitance CTG Transfer efficiency CTE *2 DC output level Vout Output impedance Zo *3 Power dissipation P *3, *4 *2: Charge transfer efficiency per pixel, measured at half of the full well capacity. *3: This depends on the output transistor drain voltage. *4: Power dissipation of the on-chip amplifier. Parameter Signal output frequency Reset clock frequency Symbol fc frg Min. Typ. 300 500 200 300 7 7 15 0.99995 7 500 100 Max. 10 10 Unit MHz MHz pF pF pF pF pF pF pF V mW
2
CCD image sensor
s Electrical and optical characteristics (Ta=25 C, unless otherwise noted)
Min. Parameter Symbol Saturation output voltage Vsat Vertical Full well capacity Fw Horizontal (summing) CCD node sensitivity Sv 25 C Dark current *5 DS (MPP mode) 0 C Readout noise *6 Nr Dynamic range (line binning) DR Photo response non-uniformity *7 PRNU Spectral response range (without window) *5: Dark current nearly doubles for every 5 to 7 C increase in temperature. *6: -40 C, operating frequency is 80 kHz. *7: Condition: half of saturation output voltage.
S9037/S9038 series
Typ. Fw x Sv 300 600 1.2 4,000 200 100 6000 200 to 1100 Max. 10 Unit V keV/ee-/pixel/s e-rms % nm
s Spectral response (without window) *8
100 90 (Typ. Ta=25 C) BACK-THINNED
s Spectral transmittance characteristics
100 90 80 (Typ. Ta=25 C)
QUANTUM EFFICIENCY (%)
80 70 60 50 40 30 FRONT-ILLUMINATED (UV COAT) 20 FRONT-ILLUMINATED 10 0 200 400 600 800 1000 1200
TRANSMITTANCE (%)
QUARTZ WINDOW 70 60 50 40 30 20 10 0 100 200 300 400 500 600 700 800 900 1000 1100 1200 AR COATED SAPPHIRE
WAVELENGTH (nm)
KMPDB0058EA
WAVELENGTH (nm)
KMPDB0110EA
*8: Spectral response with quartz glass or AR-coated sapphire are decreased by the transmittance.
s Spectral response of photosensitive surface (without cap)
(Typ. Ta=25 C) 120
s Dark current vs. temperature
10000 (Typ.)
QUANTUM EFFICIENCY (%)
100
DARK CURRENT (e-/pixel/s)
1000
80
100
60
10
40
1
20
0.1 -50
0 100 120 140 160 180 200
-40
-30
-20
-10
0
10
20
30
TEMPERATURE (C)
WAVELENGTH (nm)
KMPDB0150EA
KMPDB0037EB
3
CCD image sensor
s Device structure S9037-0902, S9038-0902S
S9037/S9038 series
THINNING
SS
P1V P2V
THINNING
TG RG
4 ACTIVE 2 BEVEL 6
RD
ISH
OD
1 OS
OG
SG
P2H
P1H
IG2H
IG1H
4 BLANK
512 ACTIVE
4 BLANK
KMPDC0159EC
S9037-1002, S9038-1002S
THINNING
SS
P1V
THINNING
P2V TG RG
4 ACTIVE 8
OD
1
OS
OG
SG
P2H
P1H
IG2H
IG1H
4 BLANK 6 BEVEL
1024 ACTIVE
4 BLANK 6 BEVEL
KMPDC0160EB
4
3 BEVEL
RD
ISH
1 BEVEL
CCD image sensor
s Timing chart (line binning)
INTEGRATION PERIOD VERTICAL BINNING PERIOD Tpwv
S9037/S9038 series
READOUT PERIOD
INTEGRATION PERIOD
P1V P2V, TG Tpwh, Tpws
P1H P2H SG Tpwr RG Vos
KMPDC0161EA
P1V, P2V, TG P1H, P2H
SG RG TG (P2V) - P1H
Parameter Pulse width Rise and fall time Pulse width Rise and fall time Duty ratio Pulse width Rise and fall time Duty ratio Pulse width Rise and fall time Overlap time
Symbol Tpwv Tprv, Tpfv Tpwh Tprh, Tpfh Tpws Tprs, Tpfs Tpwr Tprr, Tpfr Tovr
Min. 1 50 50 5 3
Typ. 20 10 50 10 50 15 -
Max. -
Unit s ns ns ns % ns ns % ns ns s
5
CCD image sensor
s Dimensional outlines (unit: mm) S9037-0902
WINDOW 16.3 ACTIVE AREA 12.29
S9037/S9038 series
S9037-1002
WINDOW 28.6 ACTIVE AREA 24.58
0.096
22.4
22.9
0.096
22.4
2.54 44.0
2.54 34.0
INDEX MARK PIN No. 1
PHOTOSENSITIVE SURFACE
4.4 4.8 3.8
INDEX MARK PIN No. 1
PHOTOSENSITIVE SURFACE 3.8 4.4
7.3
22.9
8.2
8.2
3.0
2.4
3.0
(24 x) 0.5
KMPDA0153EB
(24 x) 0.5
2.4
KMPDA0154EA
S9038-0902S
WINDOW 16.3 ACTIVE AREA 12.29
S9038-1002S
WINDOW 28.6 ACTIVE AREA 24.58
0.096
0.096
22.4
19.0
22.9
8.2
4.0
2.54 34.0 42.0 50.0
INDEX MARK PIN No. 1
7.7
2.54 44.0 52.0 60.0
INDEX MARK PIN No. 1
PHOTOSENSITIVE SURFACE
7.3 6.7
PHOTOSENSITIVE SURFACE
6.7 7.7
TE-COOLER
3.0 1.0
4.8
TE-COOLER
3.0
(24 x) 0.5
KMPDA0155EA
(24 x) 0.5
KMPDA0156EA
6
1.0
4.8
4.0
19.0
22.4
22.9
8.2
4.8
CCD image sensor
s Dimensional outlines of windowless types (unit: mm) S9037-0902N
WINDOW 16.3 ACTIVE AREA 12.29
S9037/S9038 series
S9037-1002N
WINDOW 28.6 ACTIVE AREA 24.58
0.096
22.4
22.9
0.096
22.4
2.54 34.0
2.54 44.0
INDEX MARK PIN No. 1
PHOTOSENSITIVE SURFACE
INDEX MARK PIN No. 1
PHOTOSENSITIVE SURFACE
4.8
3.0
4.8
2.4
3.0
(24 x) 0.5
KMPDA0165EA
(24 x) 0.5
2.4
22.9
4.5
4.5
KMPDA0166EA
S9038-0902N
WINDOW 16.3 ACTIVE AREA 12.29
S9038-1002N
WINDOW 28.6 ACTIVE AREA 24.58
0.096
0.096
22.4
19.0
22.9
4.5
4.0
2.54 34.0 42.0 50.0
2.54 44.0 52.0 60.0
INDEX MARK PIN No. 1
PHOTOSENSITIVE SURFACE
7.7
INDEX MARK PIN No. 1
PHOTOSENSITIVE SURFACE
4.0
19.0
TE-COOLER
TE-COOLER
3.0 1.0
4.8
3.0
(24 x) 0.5
KMPDA0167EA
(24 x) 0.5
1.0
4.8
7.7
22.4
22.9
KMPDA0168EA
s P in c o n n e c tio n s
P in No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Sym bol RD OS OD OG SG P2H P1H IG 2 H IG 1 H IS H TG P2V P1V NC NC NC NC SS NC NC NC RG S 9 0 3 7 s e r ie s D e s c r ip tio n R e s e t d r a in O u tp u t tr a n s is to r s o u r c e O u tp u t tr a n s is to r d r a in O u tp u t g a te S u m m in g g a te R em a rk +12 V E xternal R 2= 2.2 k +15 V +3 V S am e tim ing as P 2H Sym bol RD OS OD OG SG P2H P1H GND GND S h o r te d to R D S am e tim ing as P 2V IG 2 H IG 1 H IS H TG P2V P1V Th1 Th2 PP+ SS NC NC NC RG S 9 0 3 8 s e r ie s D e s c r ip tio n R e s e t d r a in O u tp u t tr a n s is to r s o u r c e O u tp u t tr a n s is to r d r a in O u tp u t g a te S u m m in g g a te R em a rk +12 V E xternal R L= 2.2 k +15 V +3 V S am e tim ing as P 2H
C C D h o r iz o n ta l r e g is te r c lo c k - 2 C C D h o r iz o n ta l r e g is te r c lo c k - 1 T e s t p o in t ( h o r iz o n ta l in p u t g a te - 2 ) T e s t p o in t ( h o r iz o n ta l in p u t g a te - 1 ) T e s t p o in t ( h o r iz o n ta l in p u t s o u rc e) T r a n s fe r g a te C C D v e r tic a l r e g is te r c lo c k - 2 C C D v e r tic a l r e g is te r c lo c k - 1
4.5
C C D h o r iz o n ta l r e g is te r c lo c k - 2 C C D h o r iz o n ta l r e g is te r c lo c k - 1 T e s t p o in t ( h o r iz o n ta l in p u t g a te - 2 ) T e s t p o in t ( h o r iz o n ta l in p u t g a te - 1 ) T e s t p o in t ( h o r iz o n ta l in p u t s o u rc e) T r a n s fe r g a te C C D v e r tic a l r e g is te r c lo c k - 2 C C D v e r tic a l r e g is te r c lo c k - 1 T h e r m is to r T h e r m is to r T E - c o o le r T E - c o o le r + S u b s tr a te ( G N D )
GND GND S h o r te d to R D S am e tim ing as P 2V
S u b s tr a te ( G N D )
GND
R e s e t g a te
R e s e t g a te
7
CCD image sensor
s Specifications of built-in TE-cooler (Typ.)
S9037/S9038 series
Parameter Symbol Condition S9038-0902 S9038-1002 Unit Internal resistance Rint Ta=25 C 2.5 1.2 Maximum current *8 Imax Tc *9=Th *10=25 C 1.5 3.0 A Maximum voltage Vmax Tc *9=Th *10=25 C 3.8 3.6 V M axim um heat absorption *11 Qmax 3.4 5.1 W Maximum temperature 70 70 C of heat radiating side *8: Maximum current Imax: If the current greater than this value flows into the thermoelectric cooler, the heat absorption begins to decrease due to the Joule heat. It should be noted that this value is not the damage threshold value. To protect the thermoelectric cooler and maintain stable operation, the supply current should be less than 60 % of this maximum current. *9: Temperature of the cooling side of thermoelectric cooler. *10: Temperature of the heat radiating side of thermoelectric cooler. *11: Maximum heat absorption Qmax. This is a theoretical heat absorption level that offsets the temperature difference in the thermoelectric cooler when the maximum current is supplied to the unit.
S9038-0902S
7 6 5 (Typ. Ta=25 C) VOLTAGE vs. CURRENT CCD TEMPERATURE vs. CURRENT 30 20
7 6
S9038-1002S
(Typ. Ta=25 C) VOLTAGE vs. CURRENT CCD TEMPERATURE vs. CURRENT 30 20 10 0 -10 -20 -30 -40
CCD TEMPERATURE (C)
10 0 -10 -20 -30 -40 2.0
5
4 3 2 1 0
4 3 2 1 0 0 1 2 3 4
0
0.5
1.0
1.5
CURRENT (A)
KMPDB0178EA
CURRENT (A)
KMPDB0179EA
s Specifications of built-in temperature sensor
A chip thermistor is built in the same package with a CCD chip, and the CCD chip temperature can be monitored with it. A relation between the thermistor resistance and absolute temperature is expressed by the following equation. R1 = R2 x expB (1 / T1 - 1 / T2) where R1 is the resistance at absolute temperature T1 (K) R2 is the resistance at absolute temperature T2 (K) B is so-called the B constant (K) The characteristics of the thermistor used are as follows. R (298K) = 10 k B (298K / 323K) = 3450 K
RESISTANCE
1 M (Typ. Ta=25 C)
100 k
10 k 220
240
260
280
CCD TEMPERATURE (C)
300
KMPDB0111EA
VOLTAGE (V)
VOLTAGE (V)
TEMPERATURE (K)
8
CCD image sensor
s Precaution for use (Electrostatic countermeasures)
S9037/S9038 series
q Handle these sensors with bare hands or wearing cotton gloves. In addition, wear anti-static clothing and use a wrist band with an earth ring, in order to prevent electrostatic damage due to electrical charges from friction. q Avoid directly placing these sensors on a work-desk or work-bench that may carry an electrostatic charge. q Provide ground lines or ground connection with the work-floor, work-desk and work-bench to allow static electricity to discharge. q Ground the tools used to handle these sensors, such as tweezers and soldering irons. It is not always necessary to provide all the electrostatic measures stated above. Implement these measures according to the amount of damage that occurs.
s Element cooling/heating temperature incline rate
Element cooling/heating temperature incline rate should be set at less than 5 K/min.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. (c)2007 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K., Solid State Division 1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, www.hamamatsu.com
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658 France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777 North Europe: Hamamatsu Photonics Norden AB: Smidesvagen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01 Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741
Cat. No. KMPD1067E04 Oct. 2007 DN
9

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